- Ultra precision wafer stage for lithographic machine.
- Number of axes: 4.
- Travel length x, y, z: 150, 150, 0.18 mm.
- Rotation yaw: ±0.5 mrad.
- Position measurement resolution: 0.037, 0.037, 50 nm.
- Max. travel speed x, y: 0.15 mm/s.
- Mechanical position accuracy: ±500 nm.
- Absolute position accuracy x, y: ±0.5 nm.
- Position measurement frequency: 2.5 MHz.